| 摘要 |
A microgyroscope tunable against an external translational acceleration includes an oscillating mass floating over a wafer to oscillate in a first direction, a driving electrode for oscillating the oscillating mass, a sensing mass oscillating together with the oscillating mass and concurrently moving in a second direction, wherein the second direction is perpendicular to the first direction, a sensing electrode for sensing a motion of the sensing mass, and a sensing electrode supporting portion for movably securing the sensing electrode so that the sensing electrode can move in the second direction with the sensing mass. A microgyroscope according to the present invention is able to prevent sensing signals due to an external disturbance, such as noise or impulse.
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