发明名称 Verfahren zur Herstellung cyclisch verlaufender Schichten
摘要 1,217,863. Coating apparatus. CARL-ZEISSSTIFTUNG [trading as JENAER GLASWERK SCHOTT & GEN]. 9 April, 1968 [11 April, 1967], No. 16994/68. Heading B2L. [Also in Division C7] Material is deposited, e.g. by vapour deposition or spraying, on a substrate or a previously treated substrate is irradiated through two masks rotating at different speeds to form an interference filter. The masks are so rotated that the one which first completes a revolution is stopped until the other completes its revolution. The substrate may also be rotated, and the masks and the substrate may be driven by separate motors. The rotation of the masks may be controlled photoelectrically.
申请公布号 DE1621263(A1) 申请公布日期 1970.08.20
申请号 DE19671621263 申请日期 1967.04.11
申请人 JENAER GLASWERK SCHOTT & GEN. 发明人 WALTER GEFFCKEN,DR.HABIL.
分类号 C23C14/04 主分类号 C23C14/04
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