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发明名称
METHOD AND APPARATUS FOR INCREASING BULK CONDUCTIVITY OF A FERROELECTRIC MATERIAL
摘要
申请公布号
KR20050016940(A)
申请公布日期
2005.02.21
申请号
KR20047021418
申请日期
2004.12.28
申请人
发明人
分类号
H01L21/20;H01L21/31;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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