| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer for measuring the dimensions of various objects to be measured without any contact by one interferometer. SOLUTION: The interferometer 10 for obtaining dimensions L<SB>S</SB>, based on the interference fringes of an object 34 to be measured, where the approximate value of the dimensions is known, comprises a light irradiation means 16 that is arranged annularly and irradiates the object 34 to be measured and the side from both the sides with measurement light 74, 76; a periphery photosynthesis means 14 for forming periphery interference light 50 by periphery measurement light through the side of the object 34 to be measured and reference light 40; a center photosynthesis means 14 for forming center interference light 52 by center measurement light reflected from the object 34 to be measured and the reference light 40; a periphery light observing means 18 for observing the interference light 50 as periphery interference fringes; a center light observing means 20 for observing the interference light 52 as center interference fringes; and a center light image-forming means 22 for setting the interference light 52 to a magnification matched with the size of the light reception section of the observing means 20 for forming an image. COPYRIGHT: (C)2005,JPO&NCIPI
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