| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor which can curb deterioration of detecting precision due to uneven thickness of a diaphragm part and deterioration of a yield ratio due to adhesion abrasive particles. SOLUTION: A detected pressure guiding concave part 4 is formed on the rear side of a silicon substrate for diaphragm formation 2. A thin diaphragm part 5 is formed on the surface of the silicon substrate for diaphragm formation 2 by the detected pressure guiding concave part 4. A piezoresistance 7 or the like are formed on the diaphragm part 5 and a junction layer for silicon 9 which uses the diaphragm part 5 as a concave part for a standard room 10 id formed on the silicon substrate for diaphragm formation 2. A silicon substrate for diaphragm fixation 3 is directly formed on the silicon substrate for diaphragm formation 2. Then the concave part for a standard room 10 is sealed with the silicon substrate for diaphragm fixation 3 to form a pressure standard room 13. COPYRIGHT: (C)2005,JPO&NCIPI
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