| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a position detection device capable of detecting the center position of a position measuring mark with a simple and inexpensive constitution, and detecting the mark center position highly accurately regardless of fouling with a passage of time of the position measuring mark or a moving body. <P>SOLUTION: In this position detection device, the position measuring mark formed on the surface of the moving body is detected optically by using a sensor means. The device has a constitution wherein the position measuring mark is formed in a belt shape and formed so that its longitudinal direction disagrees with the moving direction of the moving body, and a sensitive region of the sensor means has a characteristic line in parallel with the longitudinal direction of the position measuring mark, and has a shape formed longitudinally in the direction of the characteristic line, wherein its width in the direction orthogonal to the characteristic line direction is narrowed gradually toward at least either tip in the characteristic line direction. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
