| 摘要 |
PROBLEM TO BE SOLVED: To provide a miniaturizable and cost-reducible gas output flow measuring sensor capable of detecting accurately the inflow state of gas. SOLUTION: The gas flows into a gas chamber 7 on the left side of a piston 4 from an inflow port 6b of a cap 6, and the pressure in the gas chamber 7 is raised. Then, the piston 4 is pushed and moved in the right direction by the pressure in the gas chamber 7, and each discharge port 1c of a housing 1 is opened gradually, and the gas is discharged from the gas chamber 7 to the outside through each discharge port 1c. When inflow of the gas into the gas chamber 7 is stopped, the pressure in the gas chamber 7 is lowered, and the piston 4 is pushed back up to the position where each discharge port 1c is blocked by an elastic force of each spring 3a, 3b. Hereby, a variation of the moving position of the piston 4 corresponds to the inflow state of the gas. Consequently, the change of the inflow state of the gas can be detected based on the variation per unit time of the moving position of the piston 4. COPYRIGHT: (C)2005,JPO&NCIPI
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