| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid drop weight measuring instrument for measuring precisely a weight of a liquid drop delivered from a delivery head, and a liquid drop delivering device. SOLUTION: A QCM sensor 106 is constituted of an electrode 110a, an electrode 110b, and a quartz oscillator 110 with the electrode 110a and the electrode 110b on both faces. A measuring part 112 detects, as the first resonance frequency, a resonance frequency of the quartz oscillator 110 before the liquid drop delivered from the delivery head 103 is deposited on the electrode 110b, and detects a resonance frequency of the quartz oscillator 110 after the deposition, as the second resonance frequency. The measuring part 112 measures the weight of a liquid drop deposited to the electrode, based on the first resonance frequency and the second resonance frequency. A control part 101 controls the execution of weight measurement for the liquid drop, so as to execute the weight measurement for the liquid drop when the first resonance frequency is not within the first prescribed range, and to execute the weight measurement for the liquid drop when the first resonance frequency is within the first prescribed range. COPYRIGHT: (C)2005,JPO&NCIPI
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