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发明名称
摘要
申请公布号	JP2005504880(A)	申请公布日期	2005.02.17
申请号	JP20020583695	申请日期	2002.04.10
申请人		发明人
分类号	H05H1/24;C23C14/28;C23C14/30;C23C14/35;C23C16/50;C23C16/503;C23C16/505;C23C16/54;C23F4/00;H01J37/32;H01J49/42;H01L21/205;H01L21/3065;H05H1/14;H05H1/46;(IPC1-7):C23C16/54	主分类号	H05H1/24
代理机构		代理人
主权项
地址

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