发明名称 Method and apparatus for polarisation dependent and spatially resolved inspection of a surface or layer
摘要 <p>Method for examining a surface (12) or a layer in which polarized visual radiation (18) is used to illuminate the surface or layer and measurement radiation (36) reflected or scattered originating from locations (38) on the surface is measured to determine surface polarization properties. Independent claims are also included for the following:- (a) a device for examining the polarization properties of a surface and; (b) a sensor for measuring optical radiation with a field of photodetector elements over which a polarization filter, especially in the form of a metal, is applied.</p>
申请公布号 EP1507137(A1) 申请公布日期 2005.02.16
申请号 EP20040012448 申请日期 2004.05.26
申请人 SICK AG 发明人 BLOEHBAUM, FRANK
分类号 G01N21/21;G01J4/04;G02B5/30;(IPC1-7):G01N21/21;G01J3/447 主分类号 G01N21/21
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