| 摘要 |
PROBLEM TO BE SOLVED: To provide an output monitoring method and device of a pulsed laser system capable of improving the S/N ratio, setting optionally time responsiveness, and measuring an accurate output. SOLUTION: This output monitor M is constituted of a pin photodiode 6 for receiving pulse-oscillated laser light and converting the light into an electric signal, a primary integration circuit 7 for acquiring a pulsed energy waveform by performing primary integration of the electric signal, a secondary integration circuit 8 for acquiring average energy by smoothing by performing secondary integration of the pulsed energy waveform acquired by the primary integration circuit 7, and an amplifying circuit 9 for amplifying the average energy acquired by the secondary integration circuit 8 and outputting it to external control equipment 10. Sampling is performed at the point of a summit arrival time of the pulsed energy waveform acquired by the primary integration circuit 7 based on a control command from the external control equipment 10, and the pulsed energy in proportion to the incident light quantity is outputted to the external control equipment 10. COPYRIGHT: (C)2005,JPO&NCIPI
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