| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting laser capable of obtaining a stable polarized wave plane. SOLUTION: The surface emitting laser for emitting a laser beam perpendicular to a growing layer comprises a substrate having an exit port for light, a first distribution reflecting layer formed on the substrate, an active layer put between first and second spacer layers vertically and formed on the first distribution reflecting layer, a tunnel junction formed at a central portion on the upper first spacer layer, a third spacer layer formed circumferentially and on an upper part of the tunnel junction, a contact layer formed on the third spacer layer and having unevenness on the surface thereof formed like diffraction grating, a first electrode formed at a circumferential part on the contact layer, a second electrode formed at a portion on the rear surface of the substrate other than the light exit port; and a second distribution reflecting layer to face the contact layer via an air gap. COPYRIGHT: (C)2005,JPO&NCIPI
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