DEVICE FOR MEASURING AND QUANTITATIVE PROFILING OF CHARGED PARTICLE BEAMS

摘要

A co-axial electro-mechanical feedthrough for ultra high vacuum application is provided for both moving a Faraday collector as well as measuring the electrical signal set up by the impinging charged particles on the Faraday collector by placing electrical feedthrough inside the motion feedthrough. When the thimble of the motion feedthrough is rotated, linear motion is simultaneously transmitted to the co-axial arrangement of the Faraday collector and the electrical feedthrough without any relative motion between the two. The improved device has a standard ultra high vacuum flange for mounting on the vacuum chamber and requires only one port. The improved electro-mechanical device of the invention is useful for profiling the charged particle beams encountered in vacuum based analytical instruments and systems such as mass spectrometers, ion and electron accelerators and electron beam welding machines, etc.