| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar optical waveguide in which the refractive index, the melting temperature and the thermal process temperature of the core and the over clad layer can be easily controlled by forming a light propagating layer of the planar optical waveguide by using an aerosol process, and to provide a method for manufacturing the optical waveguide. SOLUTION: The planar optical waveguide is manufactured by depositing an under clad layer 20 on a silicon substrate 10, depositing a core layer on the under clad layer 20 by using an aerosol process, etching the core layer to produce the core 30, and forming the over clad layer 40 on the under clad layer 20 and on the core 30 in an aerosol process. COPYRIGHT: (C)2005,JPO&NCIPI |
