| 摘要 |
The invention relates to a method for checking or calibrating the angle- dependent alignment of a reference structure on a high-precision test-piece (1). After arrangement of the test-piece (1) on a retainer piece (3), a pre- alignment of an optical unit (8, 8a, 8b, 8c) and/or the reference structure of the test-piece (1) is carried out, such that the test-piece beam (10, 10a, 10b, 10c, 10d) is at least partly incident on a detector (9) and generates a t least one point (12) there. The position of the at least one point (12) on t he detector (9) is evaluated by means of a control/regulation unit (13). After a relatively fine alignment of the optical unit (8, 8a, 8b, 8c), relative to t he reference structure, by means of the control/regulation unit (13), depending on the position of the at least one point (12) on the detector (9), such tha t the at least one point (12) has a given set position on the detector (9), a recording of at least the retainer piece rotation angle and/or the measuring piece rotation angle is carried out, whereby a beam (30, 35a, 35b, 35c, 35d) from the reference structure of the test-piece (1) is generated, or modified with relation to a beam parameter, in particular, by reflection, stopping, filtering or shaping and the generated or altered beam (30, 35a, 35b, 35c, 35d) forms the test-piece beam (10, 10a, 10b, 10c, 10d).
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