| 摘要 |
PROBLEM TO BE SOLVED: To provide a molecular drag pump reducing surface temperature of an upper end surface part of a rotor of a turbo molecular pump part as compared with a conventional one with meeting a demand of a device on which vacuum exhaust is performed for avoiding high temperature radiation heat from a molecular drag pump side and suppressing increase of manufacturing cost and running cost. SOLUTION: In this molecular drag pump, the rotor of the turbo molecular pump part 2 is formed to enable to be separated into two of an upper part rotor 6a and the lower part rotor 6b, and packing 7a, 7b of heat insulating material is put therebetween to prevent heat transfer therebetween. Also in this molecular drag pump, a casing covering a stationary blade stage of the turbo molecular pump part 2 is formed to enable to be separated into two of an upper casing rotor 10a and the lower part casing 10b, and packing 11a, 11b of heat insulating material is put therebetween to prevent heat transfer therebetween. The upper part casing 10a and the lower part casing 10b are cooled by a cooling means using cooling water pipe. COPYRIGHT: (C)2005,JPO&NCIPI
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