| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for cleaning a material to be cleaned which does not require the transfer of the material to be cleaned during cleaning processes, does not pollute the environment by diffusion of a solvent vapor, carries out liquid cleaning and vapor cleaning in parallel efficiently using a small number of cleaning vessels, and can perform a rapid cleaning operation at a low cost when both the liquid cleaning and the vapor cleaning are carried out in the cleaning of the material to be cleaned, and to provide its device. SOLUTION: The material to be cleaned 3 is cleaned by a liquid in one vessel of a plurality of cleaning vessels which cleans the material to be cleaned 3, and is cleaned with a vapor by connecting a vapor generating mechanism 10 to the other cleaning vessel 2. After finishing of the vapor cleaning, the other cleaning vessel 2 which has carried out the vapor cleaning is reduced in pressure by connecting to a pressure reducing vessel 6, and then a stop valve 11 is opened which connects one cleaning vessel 1 to the other cleaning vessel 2 to transfer a cleaning liquid 12 in the one cleaning vessel 1 to the other cleaning vessel 2. Further, the liquid cleaning is performed in the other cleaning vessel 2 and also the vapor cleaning is performed by introducing the vapor from the vapor generating mechanism 10 to the one cleaning vessel 1 repeatedly. COPYRIGHT: (C)2005,JPO&NCIPI
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