| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method etc. of a microstructure element capable of precisely manufacturing a desired fine shape element irrespective of an outer environment (disturbance). <P>SOLUTION: The manufacturing method of a microstructure element comprises a dividing process of dividing a processing region into sub-regions SB1, SB2, SB3, SB4, SB5, SB6, a first shape forming process of forming a first shape on either sub-region SB1, a second shape forming process of forming a second shape on the position away from the sub-region SB2 adjacent to the sub-region SB1 by using the sub-region SB1 as reference and repeating processes of repeating the second shape forming process by using the sub-region SB3 on which the second shape is formed as new reference. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
