发明名称 |
METHOD FOR RECOGNIZING WORK IN DIE BONDER AND DIE BONDER |
摘要 |
<p>In order to perform image recognition at higher speed and with higher accuracy in a die bonder, a first high-function camera (100) is disposed fixedly above a position coated with bonding material (PS) located on this side in the middle of carrying passage of a carrier (70) and a second high function camera (110) is disposed fixedly above the bonding position (PB) of a semiconductor chip located on the forward side in the middle of carrying passage of the carrier (70). The first high function camera (100) image-recognizes the coating state of bonding material for all bonding regions (2) collectively at least in one row in the widthwise direction of a substrate, and the second high function camera (110) image-recognizes the bonding state of the semiconductor chip for all bonding regions (2) collectively at least in one row in the widthwise direction of the substrate (1).</p> |
申请公布号 |
WO2005013351(A1) |
申请公布日期 |
2005.02.10 |
申请号 |
WO2003JP09763 |
申请日期 |
2003.07.31 |
申请人 |
NEC MACHINERY CORPORATION;MIKI, KOUJI;MITSUDO, JUN |
发明人 |
MIKI, KOUJI;MITSUDO, JUN |
分类号 |
G06T7/00;H01L21/52;(IPC1-7):H01L21/52 |
主分类号 |
G06T7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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