| 摘要 |
PROBLEM TO BE SOLVED: To provide semiconductor process equipment and a process diagnostic method by which semiconductor processes are totally diagnosed before starting the semiconductor processes. SOLUTION: In the process diagnostic method to control the semiconductor processes including the operation of a system having a plurality of sub-modules, the process diagnostic method and the semiconductor process equipment includes steps of diagnosing the states of a plurality of the sub-modules before starting the semiconductor processes, checking process conditions of the system, and informing users of states of the sub-modules and the process conditions, by which a centralized system management is available with no prevention of system failures during semiconductor manufacturing processes and no management of an operator by module are required, and a semiconductor manufacture yield is improved. COPYRIGHT: (C)2005,JPO&NCIPI
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