| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor having excellent airtightness, and having firm joining of a holder and a lid member. SOLUTION: This pressure sensor has: the holder 1 installed with a semiconductor pressure sensor element 21 outputting a voltage signal according to received pressure; a connector case 3 fixing lead members 23 connected to the semiconductor pressure sensor element 21; a diaphragm 4 forming a pressure detection chamber 6 filled with an insulation oil together with the holder 1; and the metal lid member 5 installed with a pressure lead-in pipe 51. In the pressure sensor, the holder 1 is made of a metal, and has a through hole 12 connecting the pressure detection chamber 6 and the outside, and a sealing member 27 closing up the through hole 12. The connector case 3 has an insertion hole 31 communicating with the through hole 12 and allowing insertion of the sealing member 27, and the diaphragm 4 is pinched and firmly fixed by the metal holder 1 and the metal lid member 5. COPYRIGHT: (C)2005,JPO&NCIPI
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