发明名称 |
РАДИАЛЬНЫЙ АКУСТИЧЕСКИЙ ПРЕОБРАЗОВАТЕЛЬ МЕГАГЕРЦОВОГО ДИАПАЗОНА |
摘要 |
A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise two or more piezoelectric crystal segments that are separately controllable with respect to power and/or time. When assembled, the two more piezoelectric crystal segments give the acoustic energy generating means a rectangular shape, a wedge shape or a triangle shape. The resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate. |
申请公布号 |
RU2004116689(A) |
申请公布日期 |
2005.02.10 |
申请号 |
RU20040116689 |
申请日期 |
2002.11.01 |
申请人 |
ПРОДАКТ СИСТЕМЗ ИНКОРПОРЕЙТЕД (US) |
发明人 |
БЕК Марк Дж. (US);ВЕННЕРБЕК Ричард Б. (US);ЛИЛЛАРД Рэймонд Й. (US);ЛИБШЕР Эрик Г. (US) |
分类号 |
B08B3/12;G10K11/32;H01L21/304;H01L25/00;H04R1/34;H04R23/00 |
主分类号 |
B08B3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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