发明名称 |
Semiconductor processing process control system and its control method |
摘要 |
A semiconductor processing process control system comprising a skip judgment request receiving section for receiving a request for judgment as to whether a process can be skipped or not. A skip judgment yes/no section searches for a judgment plug-in corresponding to the process to be skipped and a judgment execute section activates the judgment plug-in to make a judgment as to whether the process can be skipped or not on the basis of skip judgment logic in the plug-in. A skip execute section effects skipping of the process if the judgment determines that the process can be skipped.
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申请公布号 |
US6853870(B2) |
申请公布日期 |
2005.02.08 |
申请号 |
US20040815657 |
申请日期 |
2004.04.02 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
HARAKAWA SHOICHI;IKEDA MAKOTO;FUKUDA ETSUO |
分类号 |
G05B15/02;G05B19/418;G06F17/00;H01L21/00;H01L21/02;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):G06F19/00 |
主分类号 |
G05B15/02 |
代理机构 |
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代理人 |
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地址 |
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