METHOD FOR FABRICATING ANALOG CAPACITOR TO PREVENT LEAKAGE CURRENT FROM INCREASING AND FABRICATE ANALOG CAPACITOR WITH SMALL POWER SUPPLY VOLTAGE

摘要

PURPOSE: A method for fabricating an analog capacitor is provided to prevent a leakage current from increasing and fabricate an analog capacitor with a small power supply voltage by setting post-treatment conditions of a lower electrode and a dielectric layer. CONSTITUTION: The first lower insulation layer is formed on a semiconductor substrate. The first lower conductive layer made of at least one conductive layer is formed on the front surface of the semiconductor substrate having the first lower insulation layer. The first dielectric layer and the first upper conductive layer made of at least one conductive layer are sequentially formed on the first lower conductive layer so as to fabricate a capacitor(1). The capacitance of the capacitor is measured according to a voltage(3). The measured capacitance is analyzed(5). The post-treatment conditions of a lower electrode and a dielectric layer are set according to the result of the analysis(7).