INSULATION PLATE OF AN APPARATUS FOR MANUFACTURING AN LCD SUBSTRATE WITH A BIG SIZE USING INDUCTIVELY COUPLED PLASMA TO REDUCE A PARTICLE CREATED DUE TO AN INSULATION OBJECT SPUTTERED

摘要

PURPOSE: An insulation plate of an apparatus for manufacturing an LCD(Liquid Crystal Display) substrate with a big size using ICP(Inductively Coupled Plasma) is provided to reduce a particle created while an insulation object is sputtered, by reducing thickness of the insulation plate and capacitive coupling between an antenna and plasma. CONSTITUTION: A metal block(100) has at least one penetration hole which penetrates an upper surface and a lower surface of the metal block. At least one insulation object block(200) is inserted into the penetration hole of the metal block. A vacuum o-ring is installed between an inner wall of the penetration hole and the insulation object block. The metal block is comprised of one selected from the group consisting of aluminum and metal material plated with Al2O3.