| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electron emission element in which impurities becoming a cause of property deterioration can be removed certainly by a simple method, a manufacturing method having this electron emission element, and a display device having a cleaning function of this electron emission element. <P>SOLUTION: The electron emission element 18 comprises a pair of element electrodes 31, 32 formed on a rear plate 10, conductive film 34 formed so as to connect the element electrodes 31, 32, and an electron emitting part 36 which is formed on the conductive film 34 by flowing a current to the element electrodes 31, 32. After at least the electron emitting part 36 is carbonized by an activation treatment, baking treatment is performed, then voltage of reversed polarity to the normal operation is applied to the element electrodes 31, 32 in vacuum atmosphere and the impurities adhered to the electron emitting part 36 are removed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
