METHOD OF MANUFACTURING CARBON NANOTUBE

摘要

PROBLEM TO BE SOLVED: To deposit a layer comprising a plurality of very fine carbon nanotubes on a substrate in a uniform state by the CVD method. SOLUTION: The substrate 101 is heated to 900°C by a heater 105 in a reaction furnace 104 and a plurality of the carbon nanotubes 102 are grown on the surface of the substrate 101 by the CVD method and successively the temperature of the substrate 101 is lowered to 650°C to grow the carbon nanotube 103 more longer. COPYRIGHT: (C)2005,JPO&NCIPI