| 摘要 |
PROBLEM TO BE SOLVED: To provide a superposition measuring apparatus and a superposition measurement method for acquiring a measurement value (a set of a plurality of superposition deviation amounts) precisely even if the signal waveform of an edge section is asymmetrical in a plurality of measurement points on a substrate. SOLUTION: A maximum correlation value M<SB>A</SB>in the correlation function between a representative waveform at a part related to a first mark and an inverted waveform is calculated in the first and second mark images formed on different layers of the substrate, a maximum correlation value M<SB>B</SB>in the correlation function between the representative waveform at a part related to the second mark and the inverted waveform is calculated (S2-S6), the maximum correlation values M<SB>A</SB>, M<SB>B</SB>are compared with predetermined thresholds (S8), and the amount of superposition deviation between the first and second marks is calculated on the basis of the maximum correlation values M<SB>A</SB>, M<SB>B</SB>when the maximum correlation values M<SB>A</SB>, M<SB>B</SB>are larger than the thresholds (S7, S9). COPYRIGHT: (C)2005,JPO&NCIPI |
