发明名称 METHOD FOR FORMING WIRING MEMBER
摘要 PROBLEM TO BE SOLVED: To provide such a technology that can obtain a refined wiring pattern by an energy saving process without an expensive manufacturing apparatus, utilize a material, obtain a resource saving process; and to provide a high-quality and highly reliable wiring member. SOLUTION: A base layer (102) is provided on a substrate (101), and a sol gel film (103) having an optional shape is provided thereon. Particulates made of conductive substances are accumulated in a recessed part (part without the sol gel film) formed of the sol gel film (103), and energy (105) is given to the particulates (104) and they are welded by raising a temperature to form a wiring member (106). The energy to be given may be one of light energy, laser light energy, electron beam energy, ion beam energy, and thermal energy if they can melt with one another the particulates made of the conductive substances. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005032946(A) 申请公布日期 2005.02.03
申请号 JP20030195621 申请日期 2003.07.11
申请人 RICOH CO LTD 发明人 FUSE AKIHIRO
分类号 H01L21/288;H01L21/3205;H05K3/14;H05K3/38;(IPC1-7):H05K3/38;H01L21/320 主分类号 H01L21/288
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