| 摘要 |
PROBLEM TO BE SOLVED: To provide a small and reliable spectral device which requires no mechanically movable part at wavelength scanning. SOLUTION: The measured light is dispersed with a wavelength dispersion element, which is made incident on a light receiving element, for acquiring detection signals separated for each wavelength. The spectral device comprises a digital micro mirror element in which a plurality of micro mirrors are arranged in the dispersion direction of wavelength, and two wavelength dispersion elements. The measured light dispersed with a first wavelength dispersion element is reflected on the digital micro mirror element, which is made incident on a second wavelength dispersion element. COPYRIGHT: (C)2005,JPO&NCIPI
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