发明名称 |
SLIDING ANODE FOR A MAGNETRON SPUTTERING SOURCE |
摘要 |
<p>A magnetron sputtering source includes a plurality of electrodes (12) and a switching circuit (14). The switching circuit (14) sequentially connects each of the plurality of electrodes (12) to a ground reference, making it anodic, while connecting the remaining of the plurality of electrodes as cathodes. A method of operating the magnetron sputtering source includes steps of: providing a plurality of target arrangements; causing each of the plurality of target arrangements to act as a cathode; and sequentially causing each of the plurality of cathodes to temporarily act as an anode.</p> |
申请公布号 |
WO2005010919(A1) |
申请公布日期 |
2005.02.03 |
申请号 |
WO2004CH00472 |
申请日期 |
2004.07.26 |
申请人 |
UNAXIS BALZERS AKTIENGESELLSCHAFT;HAAG, WALTER;GRUENENFELDER, PIUS |
发明人 |
HAAG, WALTER;GRUENENFELDER, PIUS |
分类号 |
C23C14/32;H01J37/34;(IPC1-7):H01J37/34 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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