| 摘要 |
PROBLEM TO BE SOLVED: To distinguish two luminous fluxes and perform optimum correction corresponding to the luminous fluxes. SOLUTION: This displacement measuring apparatus irradiates an object to be measured with scanning light, receives light reflected at the object to be measured, and performs noncontact measurement on the amount of displacement of the object to be measured. The two luminous fluxes are projected to the object to be measured within a scanning range H from a light projecting means 1, and the optical paths of the two luminous fluxes projected from the light projecting means 1 are altered outside the scanning range by a mirror 9a for detection. A first light receiving means 11A receives only either one of the two luminous fluxes altered by the mirror 9a for detection. A second light receiving means 11B receives both two luminous fluxes altered by the mirror 9a for detection. A signal processing means 12 binarizes signals from the first light receiving means 11A and from the second light receiving means 11B. The two luminous fluxes are distinguished from each other on the basis of the two binarized signals, and correction processing are performed according to each luminous flux on the basis of the results of the distinguishment. COPYRIGHT: (C)2005,JPO&NCIPI
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