CONVEYANCE MONITORING SYSTEM, CONVEYANCE SYSTEM AND SEMICONDUCTOR MANUFACTURING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a conveyance monitoring system, a conveyance system and a semiconductor manufacturing system for allowing a maintenance personnel to immediately grasp a situation in the occurrence of abnormality in a conveyance vehicle and shortening the recovery time from the occurrence in an automatic conveyance system. SOLUTION: The monitoring system is composed of a camera 14 automatically tracks travelling of a conveyance vehicle 11 and photographs an image of the vehicle 11; a camera controller 15 controlling the camera 14; an image display device 16 displaying the image photographed by the camera 14; and an image storage device 17 storing the image photographed by the camera 14. The camera 14 constantly monitors the vehicle 11, and in the occurrence of the abnormality in the vehicle 11, automatically displays the image on the display device 16. The system stores an image from a start of conveyance up to the occurrence of the abnormality into the storage device 17 and reproduces to display it on the display device 16. COPYRIGHT: (C)2005,JPO&NCIPI