UNIT FOR SEPARATING GAS

摘要

A unit for separating an exhaust gas containing a PFC gas including CF4 and C2F6 generating in a production process, which comprises a concentration device for concentrating the exhaust gas and a chromatographic separation device for separating the exhaust gas chromatographically by the use of nitrogen as a carrier gas, wherein the chromatographic separation device is packed with the molecular sieve 13 X, F-9 or the like. The unit can be suitably used for separating CF4 and C2F6 in a PFC gas effectively.