| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a forming method of sulfide group inorganic solid electrolyte restrained from change in quality with the passage of time thereof due to a reduction reaction of silicon even if made contact with metallic lithium. <P>SOLUTION: An inorganic solid electrolyte film substantially containing Li, P, and S, and not containing Si is formed on a substrate by heating the substrate with the temperature of not lower than 40°C and not higher than 180°C, or the substrate on which the thin film is formed is heated with a temperature not lower than 40°C and not higher than 180°C, after forming the inorganic solid electrolyte film substantially containing Li, P, and S, and not containing Si on the substrate with the temperature of 40°C or less. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
