| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit nozzle for cleaning which prevents film disconnection of a treatment liquid film generated by liquid drops attaching to the slit nozzle for cleaning, and a cleaning device with it. SOLUTION: The slit nozzle for cleaning has an outer package including a nozzle opening 1 for jetting out treatment liquid in the state of a thin film. The outer package comprises a first plate-like member 2, a second plate-like member 3 and a spacer 5. The outer package includes a circular groove 16a formed in an end part in a nozzle opening 1 side in an upper surface. The circular groove 16a is extended to include a section wherein the nozzle opening 1 is formed in a longitudinal direction of the nozzle opening 1. At least one of the circular groove 16a in the longitudinal direction is formed up to a side end. COPYRIGHT: (C)2005,JPO&NCIPI
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