Electron beam apparatus with specimen holder

摘要

Electron beam equipment like a transmission electron microscope has an identification unit (IDU) and a preparation holder (PH) (6) with a retaining element (18) for holding a preparation. It also has a reader unit (19) for non-contact read-out of the IDU, a goniometer (24), into which the PH is inserted, and a device (26) for controlling the goniometer's movement modes.