发明名称 |
Procedure and device for leak detection |
摘要 |
<p>A gas detector (20) is connected to the high vacuum connection (14) of the molecular pump. A test gas is fed via an inlet (22,24,26) to a point in the pump where there is a pressure level between high vacuum pressure and a fore-vacuum pressure. Part of the test gas reaches the high vacuum side and the gas detector. An independent claim is included for a leak testing apparatus.</p> |
申请公布号 |
EP1503199(A2) |
申请公布日期 |
2005.02.02 |
申请号 |
EP20040014933 |
申请日期 |
2004.06.25 |
申请人 |
PFEIFFER VACUUM GMBH |
发明人 |
LOTZ, HEINRICH;SCHOPPHOFF, ANDREAS |
分类号 |
G01M3/20;(IPC1-7):G01M3/20 |
主分类号 |
G01M3/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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