Systems and methods for improving the performance of sensing devices using oscillatory devices

摘要

Microelectromechanical (MEMS) oscillatory devices are placed adjacent a face of a microelectronic sensor platform and configured to oscillate to improve transport to the sensor of substances to be detected. The MEMS oscillatory devices can be configured to oscillate to disrupt the boundary layer that is formed adjacent the face of the microelectronic sensor platform, which may improve sensor performance. MEMS oscillatory devices may be far less susceptible to wear and breakdown than MEMS rotary devices, such as fans.