| 摘要 |
The invention relates to a scanner, wherein a position of a moveable part of the scanner is adjusted by inputting a command variable which changes repeatedly in the same manner. A command signal corresponding to the command variable is supplied to a controller (3), the controller (3) being constructed for correcting a setpoint deviation in the presence of a command variable which is constant in time. A control error of the controller (3) which arises from the change in the command variable is corrected by evaluating a setpoint deviation of the position of the moveable part or an equivalent variable, obtaining from this a correction signal and changing an output signal of the controller (3) by using the correction signal.
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