| 摘要 |
<p>A vertical magnetic recording medium has a low-noise characteristic compared to media of a permalloy or sendust crystalline material, including a high-flatness soft magnetic backing layer, and enabling recording/reproduction of information at high recording density, a magnetic recorder provided with the vertical magnetic recording medium, a vertical magnetic recording medium manufacturing method and apparatus. The vertical magnetic recording medium has a multilayer structure on a substrate, in which a soft magnetic backing layer, a vertical recording layer of a ferromagnetic body, and a protective layer are formed. The soft magnetic backing layer is formed of an FeSiAlN film of a soft magnetic material. The atom % of each element of Fe, Si, Al, and N of the FeSiAlN film can be changed by changing the flow rate of N2 gas in a mixture gas of N2 gas and Ar gas introduced into the chamber.</p> |
