METHOD OF MANUFACTURING END POINT CMP PAD FOR CHECKING EFFECTIVELY GROOVE STATE BY POSITIONING PADS WITH DIFFERENT COLOR ACCORDING TO EACH DEPTH

摘要

PURPOSE: A method of manufacturing an end point CMP(Chemical Mechanical Polishing) pad is provided to check effectively a state of a groove in a pad by applying various colors to the pad according to the depth of the groove. CONSTITUTION: A second etching stop pad(23), a first etching stop pad(25) and an upper pad(27) are sequentially formed on a lower pad(21). At this time, the pads have different colors. A plurality of grooves(29) for exposing the first etching stop pad to the outside are formed in the upper pad. The exposed first etching stop pad is removed until the second etching stop pad is selectively exposed. The upper pad is removed by using CMP(Chemical Mechanical Polishing).