APPARATUS WITH PURGE GAS SPRAYING PORTS CONNECTED THROUGH CLEANING SOLUTION SPRAYING LINES FOR CLEANING MUFFLE OF APCVD EQUIPMENT AND CLEANING METHOD THEREOF

摘要

PURPOSE: An apparatus for cleaning a muffle of APCVD(Atmospheric Pressure Chemical Vapor Deposition) equipment and a cleaning method thereof are provided to clean easily a clogged through hole of the muffle by using a plurality of purge gas spraying ports connected through cleaning solution spraying lines. CONSTITUTION: A bit of APCVD equipment includes a muffle(2) with through holes(2a) and a plurality of purge gas spraying ports(5) under the muffle. The plurality of purge gas spraying ports are connected through cleaning solution spraying lines(11), respectively. A pump(13) is connected with the cleaning solution spraying lines.