SEMICONDUCTOR SUBSTRATE CLEANING APPARATUS HAVING HEATING PLATE WITH TEMPERATURE SENSORS CAPABLE OF CHECKING EXACT TEMPERATURE OF HEATING PLATE ITSELF AND METHOD OF CONTROLLING TEMPERATURE OF HEATING PLATE USING THE SAME

摘要

PURPOSE: A semiconductor substrate cleaning apparatus and a method of controlling the temperature of a heating plate using the same are provided to detect exactly a temperature state of the heating plate by installing a plurality of temperature sensors in the heating plate. CONSTITUTION: A semiconductor substrate cleaning apparatus includes a cleaning chamber(230), a heating plate and a temperature controller. The heating plate(137) includes a plurality of temperature sensors(S1,S2) for sensing the temperature of the heating plate itself. The temperature controller(150) is used for controlling the temperature of the heating plate according to the information of the temperature sensors.