| 摘要 |
PURPOSE: A vacuum cleaning and drying device and a vacuum cleaning and drying method are provided to improve cleaning efficiency by washing and cleaning the parts in the vacuum completely regardless of shape of the part and increasing the temperature of washing fluid, and to prevent leak of washing fluid or steam by decreasing the density of oxygen. CONSTITUTION: A vacuum cleaning and drying device is composed of a cleaning and drying chamber unit(10) containing the parts(9) and washing and drying the parts, a washing fluid circulating unit(20) circulating the washing fluid by connecting the cleaning and drying chamber unit to a washing fluid regenerator(21), and a vacuum unit(30) forming and keeping vacuum in the cleaning and drying chamber unit. The cleaning and drying chamber unit comprises a cleaning and drying chamber having a door inputting and outputting the part and an agitator stirring washing fluid, a washing fluid storage chamber storing washing fluid supplied to the cleaning and drying chamber through a first washing line, and a heating coil installed in the washing fluid storage chamber to heat washing fluid and circulate a heat medium.
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