METHOD FOR FORMING VARIABLE-K GATE DIELECTRIC,申请号SG20020000222-传众专利搜索

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发明名称	METHOD FOR FORMING VARIABLE-K GATE DIELECTRIC
摘要
申请公布号	SG108291(A1)	申请公布日期	2005.01.28
申请号	SG20020000222	申请日期	2002.01.10
申请人	CHARTERED SEMICONDUCTOR MANUFACTURING LTD.	发明人	JAMES YONG MENG LEE;YING KEUNG LEUNG;YELEHANKA RAMACHANDRAMURTHY PRADEEP;JIA ZHEN ZHENG;LAP CHAN;ELGIN QUEK;RAVI SUNDARESAN;YANG PAN
分类号	H01L29/43;H01L21/28;H01L21/336;H01L29/423;H01L29/49;H01L29/51;H01L29/78;(IPC1-7):H01L21/336	主分类号	H01L29/43
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