| 摘要 |
PROBLEM TO BE SOLVED: To provide an active vibration removing device for conducting a high performance control for removing vibration in a movable stage. SOLUTION: This active vibration removing device 1 comprises a vibration removing stand 11 supporting a movable stage 2 with an article O to be mounted, an air pressure actuator 12 applying a force to the stand, and a control system 14 actuating the actuator 12 for applying the force to the vibration removing stand 11. Feed forward control signals for actuating the actuator 12 based on input signals indicating an action condition of a stage 2 inputted in real time are outputted from the control system 14, using a transmission function for associating an actuation condition of the stage 2 found by a first transmission function associating the actuation condition of the stage 2 with the actuation condition of the vibration removing stand 11 generated together with it, and an inverted transmission function obtained from a second transmission function associating the actuation condition of the actuator 12 with the actuation condition of the vibration removing stand 11 generated together with it with the actuation condition of the actuator 12 for eliminating the vibrations of the vibration removing stand 11 generated with it. COPYRIGHT: (C)2005,JPO&NCIPI
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