<p>A chromosome using each of a plurality of parameters of a physical model of a semiconductor element as a gene is defined and the parameters are optimized using a gene algorithm based on the characteristics measurement data of a semiconductor element fabricated by way of trial. In the selection processing of the gene algorithm, a sum of a first evaluation value based on linear scale data and a second evaluation value based on logarithmic scale data is employed as the evaluation value of the chromosome.</p>
申请公布号
WO2005008580(A1)
申请公布日期
2005.01.27
申请号
WO2004JP10093
申请日期
2004.07.15
申请人
EVOLVABLE SYSTEMS RESEARCH INSTITUTE INC.;SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC.;MURAKAWA, MASAHIRO;ITO, KEIICHI;WADA, TETSUNORI