发明名称 |
SYSTEM AND METHOD OF PRODUCING THIN-FILM ELECTROLYTE |
摘要 |
An apparatus and process for producing a thin film electrolyte is provided wherein a volatile lithium-containing precursor and a volatile phosphate-containing precursor are mixed into a plasma generated from a plasma source. The mixture is then deposited upon a substrate. The apparatus has a plasma source (13) having a primary plenum (16) and a secondary plenum (23). The primary plenum is in fluid communication with a source of nitrogen gas (47) and a source of hydrogen gas (51). The secondary plenum is in fluid communication with a first bubbler (31) and a second bubbler (38). |
申请公布号 |
WO2005008828(A1) |
申请公布日期 |
2005.01.27 |
申请号 |
WO2004US22112 |
申请日期 |
2004.07.12 |
申请人 |
EXCELLATRON SOLID STATE, LLC;ZHANG, JI-GUANG |
发明人 |
ZHANG, JI-GUANG;MEDA, LAMARTINE;MAXIE, ELESTON |
分类号 |
C23C16/30;C23C16/44;C23C16/455;C23C16/509;H01M10/04;H01M10/36 |
主分类号 |
C23C16/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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