| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage apparatus capable of enhancing the control performance of a stage. SOLUTION: The stage apparatus is provided with a stage capable of holding and moving an object and a drive mechanism for driving the stage on a vibration isolating stand for isolating vibration, and includes a control means for controlling acceleration / deceleration of the drive mechanism by avoiding the coincidence between a period of the natural vibration of the vibration isolating stand and an acceleration time or a deceleration time of the drive mechanism. COPYRIGHT: (C)2005,JPO&NCIPI |
